It is used for metal, alloy,Non-metal materials Annealing, diffusion or sintering ,also as CVD experiment in wide variety of reaction temperature about 1100°C, also be used: vacuum sintering, vacuum sintering atmosphere, nano materials making, battery material preparation and other many research fields.
Electric Vacuum CVD Tube furnace Application:
Tube furnace mainly used in chemical analysis, physical decomposition and synthesis, super hard
materials (such as ceramic), Rare and precious metal smelting and purification, metal heat treatment of sintering process research and other scientific experiments. Universities and colleges, scientific research institutes, medical and health, petroleum chemical industry, mining enterprise, quality and technology supervision agencies, and other units laboratory, laboratory are the use of such equipmen.
1200.C 3 heating zone CVD Tube Furnace details specification :
Rated Voltage & Power: | AC 380V 50/60Hz, 25KW; |
Inner Chamber Size: |
Quartz tube OD170mmx 3 heating zone, each heating zone 250mm L; Tube OD 40-200mm or bigger; Single/ 2/3/5 or more heating zone optional. Each zone: 150/200/300/400/600mm optional; |
Max. Temperature: | 1200.C for short time; |
Continuous Working Temperature: | 1100.C Max. |
Max. Heating Rate: | 0-30.C /min, suggest to be 20.C/Min; |
Temperature Controller: |
PID automatic control and auto-tune function, 30 programmable segments for precise process. Each heating zone with one controller. |
Temperature Accuracy: | +/- 1 .C. |
Heating Element: |
1200.C grade Fe-Cr-Al Alloy doped by Mo. |
Thermocouple : | K type |
Vacuum: | rough vacuum -0.1Mpa, 5000pa,10Pa, 1.33x10^-1Pa, 1.33x10^-3Pa optional; |
Vacuum gague : | regular vacuum gagule(-0.1-0.15Mpa),Digital vacuum gague, resistance vacuum gague (10*5Pa-10*-1Pa),composite vacuum gague (10*5Pa-10*-5Pa) optional; |
Atmosphere | Inert gas,N2,O2,CO2,Air gas available. |
Gas mixing system: |
2/3/4/5 Float flowmeter gas control/MFC gas control system; With One mixing tank; flowmeter range: 0.03-0.3SLM,10-100SCCM,16-160ml/min,25-250cc/min optional; For precision gas control, you can choose digital mass flow Control system instaed of float-meter. SCCM 0~5,10,20,30,50,100,200,500 SLM 0~1, 2, 3, 5, 10,15, 20, 30 |
Standard Parts: | Vacuum pump 1pc, high temperature gloves 1 pair , one user manual. |
Optional parts: | PLC touch screen controller, paperless recorder,Remote communication control system, 2-3 gas channels mixing system desktop. |
Three heating zone tube furnace Application Notes:
(1)Furnace tube pressure can not be higher than 0.02MPa
(2)As the internal pressure of the cylinder is high, so the gas into the furnace tube, the cylinder must be installed on the valve, the proposed purchase of the company pressure valve, the company valve range of 0.01MPa-0.1MPa, Will be more accurate and safe
(3)When the furnace temperature is higher than 1000 ℃, the furnace tube can not be in a vacuum state, the furnace pressure and atmospheric pressure equivalent to maintain the atmospheric pressure
(4)The gas flow into the furnace tube should be less than 200 SCCM to avoid the impact of cold airflow on the heated quartz tube.
The pictures of 1200.C 3 heating zone atmosphere vacuum furnace:
Warranty: One year limited warranty with lifetime support, excluding heating element,cooling fans, thermocouple and ceramic tube damaged by user.
Attention: Any damages caused by the use of corrosive and acidic gases, and any damage from wrong operate and use are not under the coverage of One Year Limited Warranty.
You May need other Tubular furnaces in the following:
1200.C laboratory tube furnace | 1400.C electric tube furnace |
1700.C sintering tubular furnace | Vertical tube furnace |
Two heating zone tube furnace |
3 heating zone tube furnace |
5 heating zone tube furnace | Rotary tube furnace |
CVD furnace with 3 gas mixing system | Cheap rtp tube furnace with movable table | ||
Nanyang Dadi Electric Equipment Co., Ltd is a professional Heat treatment furnace manufacturer with more than 10 years experiences.
Mainly Electric furnaces including :
Muffle furnace |
Atmosphere furnace |
Tube furnace |
Dental sintering furnace |
Vacuum furnace |
Crucible furnace |
Bottom loading furnace |
Car bottom furnace |
Etc. |
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1200 Degree Laboratory 3 Heating Zone Atmosphere Vacuum CVD Tube Furnace For Annealing Diffusion Sintering Materials
1200 Degree Laboratory 3 Heating Zone Atmosphere Vacuum CVD Tube Furnace For Annealing Diffusion Sintering Materials
1200 Degree Laboratory 3 Heating Zone Atmosphere Vacuum CVD Tube Furnace For Annealing Diffusion Sintering Materials
Personne à contacter : | Joise Zhang |
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